Small Size Mask Blanks
More info: www.rose-fotomasken.de
Plate Dimensions
| No | Standard Dimensions | Size (mm) min | Size (mm) max | Size (inch) min | Size (inch) max | Thickness (mm) min | Thickness (mm) max | Thickness (inch) min | Thickness (inch) max |
|---|---|---|---|---|---|---|---|---|---|
| 1 | 5.0x5.0x0.09 | 126.24 | 127.00 | 4.970 | 5.000 | 2.20 | 2.40 | 0.086 | 0.094 |
| 2 | 6.0x6.0x0.09 | 151.64 | 152.40 | 5.970 | 6.000 | 2.20 | 2.40 | 0.086 | 0.094 |
| 3 | 6.0x6.0x0.12 | 151.64 | 152.40 | 5.970 | 6.000 | 2.95 | 3.14 | 0.116 | 0.124 |
| 4 | 6.0x6.0x0.25 | 151.64 | 152.40 | 5.970 | 6.000 | 6.25 | 6.45 | 0.246 | 0.254 |
| 5 | 7.0x7.0x0.12 | 177.04 | 177.80 | 6.970 | 7.000 | 2.95 | 3.15 | 0.116 | 0.124 |
Parallelism of Substrates
A - B ≤ 5 µm
Flatness Availability of Substrates
| No | Quartz Glass 0.25µm | Quartz Glass 0.5µm | Quartz Glass 1µm | Quartz Glass 2µm | Quartz Glass 5µm | Soda Lime Glass 2µm | Soda Lime Glass 3µm | Soda Lime Glass 5µm | Soda Lime Glass 6µm | Soda Lime Glass 15µm |
|---|---|---|---|---|---|---|---|---|---|---|
| 1 | • | • | • | |||||||
| 2 | • | • | • | • | ||||||
| 3 | • | • | • | • | • | |||||
| 4 | • | • | • | • | • | |||||
| 5 | • | • | • | • | • | • | • |
Spectral Transmission Curve
Substrate Compositions
| Substrat Type | SiO5 | Al2O3 | Na2O | K2C | RO | Termal Expansion Coefficient |
|---|---|---|---|---|---|---|
| Quartz-Glass | 100 | 4-5 x 10-7/°C | ||||
| Soda-Lime-Glass | 23 | 1 | 15 | 1 | 10 | 94 x 10-7/°C |
Chrome Metalization
Properties of Standard Anti-Reflective Chrome Film Type ("ARC")
| Item | Condition | Standard Value |
|---|---|---|
| Film Thickness | 100±8 nm | |
| Optical Density | 450nm | 3.0±0.2 |
| Reflectivity | 436nm | 10±2% |
| Sheet Resistance | four-point probe | ＜26Ω/ sq |
| Wet Etching Time | Manual | 50±3 sec |
| Undercut Rate (both sides) | APT | ＜0.07μm／10 s |
| Chemical Resistance | Conc. H2SO4 at 123 °C | ＞120min |
| Chemical Resistance | Conc. H7SO4+H7SO5 at 75 °C | ＞120min |
Chrome Metalization
Pinhole Specification
| Type | Pinhole Size | Unit | Pinhole pcs |
|---|---|---|---|
| Standard Type | 1μm - 4μm | pcs / cm2 | < 0.05 |
| Low Density Type | ≥ 1.5 μm | pcs / cm2 | None |
| Zero Defect Type | ≥ 1.0 μm | pcs / cm2 | None |
Chrome Metalization
Reflection Factor
Resist Coating
Standard Resists
| Type | Resist | Thickness Nominal | Thickness Uniformity |
|---|---|---|---|
| Positive Photo | AZ 1500 | 500 nm±5% | < 20nm |
| E-Beam coatings upon request | PMMA AR-P669 | 550 nm±5% | < 20nm |
Resist Coating
Defect Density
| No | Square Quality Area | Defect Density |
|---|---|---|
| 1 | 107×107 | 0 ＞ 0.3μm |
| 2 | ??? | 0 ＞ 0.5μm |
| 3 | 127×127 | 0 ＞ 0.8μm |
| 4 | 132x132 | 0 ＞ 1.0μm |
| 5 | 157x157 | 0 ＞ 2.0μm |