ITO / MAM Materials
Soda Lime Glass, Borosilicate Glass
Thickness： 1.10mm，0.70mm，0.55mm，0.40mm
Size:
| Length/Width | Squarness | Edge | Corner |
|---|---|---|---|
| 14"X12"， 14"X14"， 14"X16"， 14"X17",Self-defining | ≤0,1% | R edge 0.2mm ≤ D ≤1.0mm， edge radius R ≤ 50mme | Small corner：c＝1.5±0.5mm Lager corner：d＝5.0±1.0mm e=2.0±1.0mm |
STN Glass Substrate
| Thickness | Warp | Waviness |
|---|---|---|
| 1.10mm | ≤0.15mm/100mm | ≤0.05mm |
| 0.70mm | ≤0.15mm/100mm | ≤0.06mm |
| 0.55mm | ≤0.15mm/100mm | ≤0.10mm |
| 0.40mm | ≤0.20mm/100mm | ≤0.15mm |
ITO Glass
| Class | Resistance （Ω/□） |
Transmittance （％） |
Etching time （S） |
ITO Thickness （Å) |
|---|---|---|---|---|
| STN80 | ≤80 | ≥87 | ≤35 | 300±50 |
| STN60 | ≤60 | ≥85 | ≤60 | 350±50 |
| STN50 | ≤50 | ≥83 | ≤60 | 400±50 |
| STN45 | ≤45 | ≥83 | ≤60 | 450±50 |
| STN40 | ≤40 | ≥82 | ≤60 | 500±100 |
| STN30 | ≤30 | ≥81 | ≤100 | 700±100 |
| STN25 | ≤25 | ≥81 | ≤120 | 800±100 |
MoAlMo Coating Specifications
| Target | Thickness | Sheet Resistance | Sheet Resistance Uniformity | Transmittance (at 550 nm) |
|---|---|---|---|---|
| ITO | 150+/-15nm | <=15Ω/□ | (max.-min.)/(2xaverage)<=10% | >=84% |
| Mo/Al/Mo | 500+/-50nm | <=0.1Ω/□ | (max.-min.)/(2xaverage)<=10% |